Creator |
|
|
|
Language |
|
Publisher |
|
|
Date |
|
Source Title |
|
Vol |
|
Issue |
|
First Page |
|
Last Page |
|
Publication Type |
|
Access Rights |
|
Crossref DOI |
|
Rights |
|
Abstract |
A multi-layer vertically stacked all sol-gel fabrication technique on bulk silicon is proposed to realize vertical coupling from planar waveguides to 3-dimensional structures. The all sol-gel fabricat...ion technique realizes the capability to stack ZnO sol-gel core layer and SiO_2 sol-gel cladding and core separation layers. A major issue with sol-gel based fabrication is the appearance of cracks on the sol-gel layer, and these were improved by a slow cooling process of 1°C/min after 500°C temperature annealing in addition to a SiO_2 surface cleaning using photoresist remover. As a result, a multi-layer vertically stacked structure with a ZnO core layer thickness of 300 nm and SiO_2 cladding/core separation layer thickness of 1.5 μm was successfully fabricated on bulk Si.show more
|