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＜departmental bulletin paper＞
Plasma Production by Helicon Wavese
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| Abstract | A high-density plasma of about 10^<13>cm^<-3> is realized by using radio-frequency (RF) waves. It is experimentally shown that efficient coupling of RF power to a plasma is possible with helicon wave...s because of the good match between parallel phase velocity and electron thermal speed.show more |
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| Created Date | 2010.06.12 |
| Modified Date | 2020.11.17 |