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We investigated the relationship between the formation of small grains and distribution of precipitates such as Si_3N_4 and SiON in a multicrystalline silicon ingot grown by the unidirectional solidif...ication method. Si_3N_4 precipitate was mainly observed inside the small grain region, while SiON was mainly precipitated outside there. We found that SiON started to precipitate prior to formation of Si_3N_4 precipitates. Therefore, precipitation of SiON prior to precipitation of Si_3N_4 plays a key role in the formation of small grains.続きを見る
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