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In this paper, we have developed a model for a 200 mm floating zone silicon crystal growth process to investigate solid–liquid interface. To study the effect of high-frequency (HF) electromagnetic (EM...) heating on the solid-liquid interface shape, HF-EM and heat transfer calculations were conducted in three dimensions. By considering 3D Marangoni and EM forces at the free surface, a more accurate interface shape has been obtained. the results showed that local growth rate became more inhomogeneous when the rotation speed of the crystal was increased. However, a more homogeneous three-phase line could be obtained with a high rotational crystal speed.続きを見る
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