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H_α emission images near metal surface were observed based on a CCD camera measurement in the Advanced PWI Simulation Experimental Device and Analysis System (APSEDAS). In the axial direction of cylin...drical plasma, it was found that the H_α emission gradually decrease toward the metal surface and drastically drop in the vicinity of the metal surface. It suggests that the axial profile of the H_α emission mainly reflect on that of electron density. The H_α emission also showed different dependence between at inductively-coupled plasma arid at helicon wave plasma in the experiments of hydrogen filling pressure scan. It was clarified that the H_α emission in the case of inductively-coupled plasma represented a more significant decrease toward the metal surface with the increase of the filling pressure.続きを見る
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