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A very high frequency capacitively coupled plasma source (100 MHz) was studied using a two-dimensional PIC simulation, and spatial distributions of the plasma parameters were examined at a discharge g...ap of 25 mm. In the simulation, electromagnetic effects were not taken into account. Electron energy distribution functions were also calculated. It was found that the density and temperature of electrons had a peak value at the center and near the edge of the discharge electrodes, while the plasma potential was fairly uniform.続きを見る
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Mendeley出力
