<紀要論文>
3D Numerical analysis of free surface shape in the floating zone (FZ) silicon growth with induction coil

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概要 The floating zone process includes a molten silicon zone between the feed rod of poly crystalline silicon above and single crystalline silicon below. The molten silicon zone is maintained by the high ...frequency induction coil. The stability of the molten silicon zone is crucial for the growth process. The shape of the molten silicon zone is determined by the surface tension force, electromagnetic force and hydrostatic pressure in the melt. Since the induction coil is not symmetric, 3D numerical model has been developed for asymmetric shape of the free surface. In this model, 3D Young-Laplacian equations have been solving using volume of fluid (VOF) model. The effect of electromagnetic force has been considered. Concentric and eccentric cases have been calculated. The calculation results are validated by the experimental results.続きを見る
目次 1.Introduction
2.Computation method
3.Results and Discussion
4.Summary

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登録日 2018.05.11
更新日 2023.08.02

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