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In order to reveal the conditions required for the formation of a neutral loop discharge (NLD) plasma, distributions of excited atoms, which were strongly related to distributions of ionization rates,... were measured under various discharge conditions by using laser induced fluorescence spectroscopy and optical emission spectroscopy. It was found that the results of these measurements were consistent with the theoretically predicted dependencies of electron heating on the magnetic field strength, the RF electric field, and the RF frequency. In addition, it was shown that effects of electron-neutral collisions and of the finite size of the device set limitations on the formation of the NLD plasma.続きを見る
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Mendeley出力
