<紀要論文>
チタン酸塩を用いた半導体センサの高温における NOx 検知特性

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概要 A series of metal titanates was examined for their NOx sensing properties at elevated temperatures of 500-600℃. As a result, BaTiO3 and SrTiO3 sensors were found to be rather sensitive to NO and/or NO...2 existing in air at 600 and 500℃, respectively, together with practically acceptable response and recovery rates. At these temperatures, both sensors exhibited almost linear sensitivity-NOx concentration correlations in the concentration range of 5-100ppm.The electrical resistance of SrTiO3 sensor at 500℃was almost independent of oxygen concentration in the range of 3-15%and scarcely affected by interfering gases such as CO2, H2, and C3H6. The NOx sensing mechanism of this element was briefly discussed.続きを見る

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登録日 2010.06.12
更新日 2020.11.17

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