| 作成者 |
|
|
|
|
|
|
|
|
|
|
|
| 本文言語 |
|
| 出版者 |
|
|
|
| 発行日 |
|
| 収録物名 |
|
| 巻 |
|
| 号 |
|
| 開始ページ |
|
| 終了ページ |
|
| 出版タイプ |
|
| アクセス権 |
|
| JaLC DOI |
|
| 関連DOI |
|
|
|
|
|
|
|
| 関連URI |
|
|
|
|
|
|
|
| 関連情報 |
|
|
|
|
|
|
|
| 概要 |
Plasma parameters were measured successfully in a 915 MHz ECR plasma with H2 and SiH4/H2 mixtures using a heated Langmuir probe. The experimental results show that there is a correlation between elect...ron temperature and crystallinity of microcrystalline silicon. From the data analysis, it was found that there is a possibility that the electron temperature increased by production of negative ions promotes the crystallinity via some chemical reactions.続きを見る
|
Mendeley出力
