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Structural Control of Magnetic Properties in Co/Pd Multilayer for Heat Assisted Perpendicular MRAM Application

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概要 Temperature dependence of magnetic properties in [Co/Pd]_N multilayer have been systematically studied for lithographically patterned samples with different Co thicknesses t_Co and the bilayer number ...N by extraordinary Hall effect measurements. The perpendicular coercive field H_c, decreases with the increase of t_Co, excepting a very thin thickness of 1 Å. While a threshold temperature (T_th) of H_c, vanishing linearly increases with the increase of t_Co. The H_c, and T_th, monotonously increases with the increase of N, ranged from 5 to 50. The superior crystalline structure for samples with the larger N was confirmed from enhanced Co/Pd(111) peak height in the XRD pattern. A practical thermal activation coefficient α of 174 was evaluated from a sweep rate dependence of H_c. A marked improvements for the heat assisted MRAM application was attained by air annealing of [Co(1.7Å)Pd(8Å)]_30 at 220℃, that is, the H_c was increased from 1.3 kOe to 2.9 kOe, while T_th reduced from 210℃ to 190℃.続きを見る

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登録日 2016.05.06
更新日 2020.10.26

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