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We have also been developing a plasma-wall interaction (PWI) simulator of which plasma source is a steady-state RF helicon wave plasma supply to demonstrate in situ and real-time measurement and to st...udy PWI phenomena. A helical antenna is surrounding a cylindrical quartz tube of which outer diameter is ～5 cm. The antenna is connected to an RF power supply of which power is up to 5kW through a matching box. A set of two coils produces an axial magnetic field of 0.05T at the plasma center. At present, the electron density at the plasma center is up to ～3 x 10^18 m^(-3) and electron temperature is up to ～10eV. Rather high plasma flux density of ～4 x 10^22 m^(-2) s^(-1) to the substrate has been obtained.続きを見る
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Mendeley出力
