<紀要論文>
熱エネルギーイオンビーム法によるプラズマプロセスガスのイオン化・分解素過程に関する研究

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概要 A new type of thermal-energy ion-beam apparatus has been constructed and applied to the study on ionization and dissociation processes of plasma processing gases. The total reaction rate constants and... product ion distributions in the ion-molecule reactions of Ar^+ and CO_2^+ with halogenated methanes and aliphatic hydrocarbons were determined. The observed rate constants amounted to 23-130% of calculated values from Langevin or average-dipole-orientation theory. The product ion distributions suggested that charge transfer occurs through near-resonant electron jump at a long range. It was shown that the beam apparatus could also be applied to the reactions of the Ar_2^+, ArN_2^+ and N_4^+ cluster ions with aliphatic hydrocarbons.続きを見る

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登録日 2009.04.22
更新日 2017.06.07