<紀要論文>
チョクラルスキー法によるすずの結晶成長実験

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概要 The semiconducting materials such as silicon and gallium arsenide have been widely employed for manufacturing integrated circuits. The crystallization process has been established as a Czochralski pro...cess but its operating procedure and a crystal rod pulling process have not been totally clarified. Herein we report the solidification results of tin from molten metal in a miniature Czochralski crystallization apparatus. The most important factor to get a crystal rod was found to control the molten temperature at an appropriate value. As a result, we got a tin rod of 19mm diameter, 109mm long and 121g weight.続きを見る

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登録日 2009.04.22
更新日 2020.11.17