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The reactions of rare-gas metastables are of considerable interest because of importance in the plasma chemical vapor deposition as well reaction dynamics. Exit channles and their cross sections have ...been determined for the reactions with the group IV compounds. Dissociation processes of these reactions have been discussed. Only a few products can be detected in emission and laser-induced fluorescence. It is pointed out that channels leading to unstable species with more than three atoms are major exit ones.続きを見る
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