<Doctoral Thesis>
Deposition Mechanism and Characterization of a-C:H Films Deposited using Ar + H2 + C7H8 Plasma CVD

Creator
Examiner
Language
Academic Year Conferred
Conferring University
Degree
Degree Type
Publication Type
Access Rights
JaLC DOI

Hide fulltext details.

pdf isee0583 pdf 3.88 MB 194 本文
pdf isee0583_abstract pdf 102 KB 129 要旨
pdf isee0583_review pdf 104 KB 137 審査結果要旨

Details

Record ID
Peer-Reviewed
Rights
Report Number
Number of Diploma
Granted Date
Date Accepted
Faculty
Location
Location
Call Number
Notes
Created Date 2016.05.10
Modified Date 2020.10.09

People who viewed this item also viewed