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Micro-ring resonators have been widely utilized in silicon photonics. However they often exhibit a high sensitivity to ambient temperature fluctuations. In this letter, we have demonstrated a compleme...ntary metal–oxide–semiconductor compatible athermal micro-ring resonator made from titanium dioxide (TiO＿2) and silicon nitride (SiN＿x). We have exploited the negative thermo–optic coefficient of TiO＿2 to counterbalance the positive coefficient of SiN＿x. By a precise control over the TiO＿2 layer thickness, an athermal condition remarkably consistent with the simulation can be achieved. Therefore, a SiN＿x–TiO＿2 hybrid micro-ring resonator with a temperature dependent wavelength shift of 0.073 pm/ ℃ has been realized.続きを見る
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