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Ball-screw-driven stages are widely used in industry for long-range and high-precision fabrication. One of the main difficulties in dealing with high-precision motion control is the nonlinear friction..., which originates at elastic deformation of the mechanical components. In this paper, first, a novel mechanical model of a ball-screw-driven stage is proposed to analyze the elastic deformation dynamics under various motion conditions. It is achieved that the mechanical deformation characteristic of fast motions differs from the case of slow motions in the zero-speed region, and therefore, performing friction compensation should take the motion conditions into account. Then, based on this observation, a sinc-function-based friction compensation method for slow motions including both reverse motions and nonreverse motions and a Sigmoid-function-based friction compensation method for fast reverse motions are proposed to improve the control performance. Thanks to the very few parameters, the proposed methods can save much trouble in design and maintenance and are particularly suitable for control purposes. Finally, the advantages of the proposed methods are evaluated by experiments.続きを見る
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