Effect of argon/hydrogen plasma cleaning on electroless ni deposition on small-area al pads - Collections

＜journal article＞
Effect of argon/hydrogen plasma cleaning on electroless ni deposition on small-area al pads

Creator	Author PID K000268 Creator Name Ikeda, Akihiro 池田, 晃裕 Affiliation Affiliation Name Graduate School of Information Science and Electrical Engineering, Kyushu University
	Author PID L001925 Creator Name Kajiwara, Kouhei Affiliation Affiliation Name Graduate School of Information Science and Electrical Engineering, Kyushu University
	Author PID L003039 Creator Name Watanabe, Naoya Affiliation Affiliation Name Graduate School of Information Science and Electrical Engineering, Kyushu University
	Author PID K002917 Creator Name Asano, Tanemasa Affiliation Affiliation Name Graduate School of Information Science and Electrical Engineering, Kyushu University
Language	English
Publisher	The Japan Society of Applied Physics
Publisher	応用物理学会
Date	2010-08
Source Title	Japanese Journal of Applied Physics
Vol	49
Issue	8 PART 2
First Page	08JA05(1)
Last Page	08JA05(4)
Publication Type	Accepted Manuscript
Access Rights	open access
Rights	(C) 2010 The Japan Society of Applied Physics
Related DOI	isIdenticalTo https://doi.org/10.1143/JJAP.49.08JA05
Related DOI
Related DOI	Japanese Journal of Applied Physics \|\| 49(8 PART 2) \|\| p08JA05(1)-08JA05(4)
	http://jjap.jsap.jp/
	http://www.jsap.or.jp/index.html
	http://portal.isee.kyushu-u.ac.jp/
Related URI	Japanese Journal of Applied Physics \|\| 49(8 PART 2) \|\| p08JA05(1)-08JA05(4)
	http://jjap.jsap.jp/
	http://www.jsap.or.jp/index.html
	http://portal.isee.kyushu-u.ac.jp/
Related URI
Related URI	isIdenticalTo https://jjap.jsap.jp/link?JJAP/49/08JA05/
Related HDL
Related HDL
Relation	Japanese Journal of Applied Physics \|\| 49(8 PART 2) \|\| p08JA05(1)-08JA05(4)
	http://jjap.jsap.jp/
	http://www.jsap.or.jp/index.html
	http://portal.isee.kyushu-u.ac.jp/

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Record ID	26107
Peer-Reviewed	Refereed
Related URI	https://jjap.jsap.jp/link?JJAP/49/08JA05/
ISSN	0021-4922
DOI	10.1143/JJAP.49.08JA05
Type	REGULAR PAPER
Created Date	2013.03.14
Modified Date	2024.01.10

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＜journal article＞ Effect of argon/hydrogen plasma cleaning on electroless ni deposition on small-area al pads

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＜journal article＞
Effect of argon/hydrogen plasma cleaning on electroless ni deposition on small-area al pads