<紀要論文>
Observation of the whole Thomson scattering spectrum of laser-produced plasmas for EUV light sources

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概要 The whole spectrum including the ion feature and the electron feature of collective Thomson scattering from laser-produced tin plasmas for EUV light sources has been observed for the first time. The p...urpose is to realize the evaluation of electron density, electron temperature, ion temperature and average ionic charge of the plasmas at the same time. Since the intensity of the electron feature is very weak compared with self-emissions from the plasma, efforts were concentrated to detect the peak wavelength of the electron feature. By applying the spectrometer system appropriately designed and optimizing the scattering geometry, it was achieved to detect the peak of the electron feature with the signal-to-noise ratio larger than one.続きを見る

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登録日 2019.11.29
更新日 2022.10.25

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