Comparison between Plasmas Produced with Aluminium and Copper Lisitano Coils - Collections

＜departmental bulletin paper＞
Comparison between Plasmas Produced with Aluminium and Copper Lisitano Coils

Creator	Creator Name 米須, 章 Yonesu, Akira ヨネス, アキラ Affiliation Affiliation Name 九州大学大学院総合理工学研究科高エネルギー物質科学専攻 Department of High-Energy Material Science, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
	Creator Name 大津, 茂実 Otsu, Shigemi オオツ, シゲミ Affiliation Affiliation Name 九州大学大学院総合理工学研究科高エネルギー物質科学専攻 Department of High-Energy Material Science, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
	Author PID L001851 Creator Name 中島, 寿年 Nakashima, Hisatoshi ナカシマ, ヒサトシ Affiliation Affiliation Name 九州大学応用力学研究所 Research Institute for Applied Mechanics, Kyushu University
	Author PID L000719 Creator Name 小森, 彰夫 Komori, Akio コモリ, アキオ Affiliation Affiliation Name 九州大学大学院総合理工学研究科高エネルギー物質科学専攻 Department of High-Energy Material Science, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
	Author PID K001817 Creator Name 河合, 良信 Kawai, Yoshinobu カワイ, ヨシノブ Affiliation Affiliation Name 九州大学大学院総合理工学研究科高エネルギー物質科学専攻 Department of High-Energy Material Science, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
Language	Japanese
Publisher	九州大学大学院総合理工学研究科
Publisher	Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
Date	1986-07-25
Source Title	Engineering sciences reports, Kyushu University
Vol	8
Issue	1
First Page	25
Last Page	30
Publication Type	Version of Record
Access Rights	open access
JaLC DOI	https://doi.org/10.15017/17652
Related DOI	九州大学大学院総合理工学研究科報告 \|\| 8(1) \|\| p25-30
	Engineering sciences reports, Kyushu University \|\| 8(1) \|\| p25-30
	http://www.tj.kyushu-u.ac.jp/
	http://www.tj.kyushu-u.ac.jp/info/online/
Related URI	九州大学大学院総合理工学研究科報告 \|\| 8(1) \|\| p25-30
	Engineering sciences reports, Kyushu University \|\| 8(1) \|\| p25-30
	http://www.tj.kyushu-u.ac.jp/
	http://www.tj.kyushu-u.ac.jp/info/online/
Relation	九州大学大学院総合理工学研究科報告 \|\| 8(1) \|\| p25-30
	Engineering sciences reports, Kyushu University \|\| 8(1) \|\| p25-30
	http://www.tj.kyushu-u.ac.jp/
	http://www.tj.kyushu-u.ac.jp/info/online/
Abstract	An attempt to produce a pure ECR plasma is performed with an aluminium Lisitano coil. Plasma parameters obtained agree well with those of the plasma produced with a copper Lisitano coil. Sputtered-imp...urity atoms which are ejected from the surface of the aluminium Lisitano coil are found to be very few, compared with the copper Lisitano coil.show more

Hide fulltext details.

File	FileType	Size	Views	Description
p025	pdf	240 KB	209

Details

Record ID	17652
Peer-Reviewed	Refereed
ISSN	0388-1717
NCID	AN00055101
Created Date	2010.06.12
Modified Date	2020.12.09

Export

Link to this page

Search Other Services

Statistics

＜departmental bulletin paper＞ Comparison between Plasmas Produced with Aluminium and Copper Lisitano Coils

Hide fulltext details.

Details

People who viewed this item also viewed

＜departmental bulletin paper＞
Comparison between Plasmas Produced with Aluminium and Copper Lisitano Coils