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Carbon Thin Films Prepared by Pulsed Laser Deposition

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Abstract Amorphous carbon thin films, which have do not have optical band gap, and diamond like carbon films, which do have an optical band gap, were grown by pulsed laser deposition at different laser wavelen...gths (λ=193nm,532nm and 1064nm)and substrate temperatures (from room temperature to 500℃). The optical absorption spectra were measured using the spectrophotometer. Diamond like carbon films are obtained at shorter laser wavelength and lower substrate temperature. The optical band gap decreases with the substrate temperature. The growth mechanisms of carbon thin films could be explained qualitatively using the subplantation model.show more

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Created Date 2010.06.12
Modified Date 2020.12.15

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