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＜departmental bulletin paper＞
ECR Plasma CVD with Multi-Slot Antenna
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| Abstract | An electron cyclotron resonance (ECR) plasma is produced with a mulutislot antenna, and the optimum conditions for preparation of MonC thin films are experimentally examined. Deposition of WO2 films i...s also attempted by sputtering of tungsten filaments, assisted with the ECR plasma.show more |
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| Created Date | 2010.06.12 |
| Modified Date | 2020.12.11 |