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＜departmental bulletin paper＞
Investigation of 915 MHz ECR Plasma Parameters with SiH4/H2 Mixtures

Creator
Creator Name
Thang, Doan Ha
Affiliation
Affiliation Name
Department of Advanced Energy Engineering Science, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
Author PID
K001284
Creator Name
Muta, Hiroshi
牟田, 浩司
ムタ, ヒロシ
Affiliation
Affiliation Name
Department of Advanced Energy Engineering Science, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
九州大学大学院総合理工学研究科先端エネルギー理工学専攻
Creator Name
Sasaki, Kazunari
佐々木, 一成
ササキ, カズナリ
Affiliation
Affiliation Name
Toso Co.LTD
トーソー株式会社
Creator Name
Kusakabe, Masakazu
日下部, 正和
クサカベ, マサカズ
Affiliation
Affiliation Name
Department of Advanced Energy Engineering Science, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
九州大学大学院総合理工学研究科先端エネルギー理工学専攻
Creator Name
Itagaki, Naho
板垣, 菜穂
イタガキ, ナホ
Affiliation
Affiliation Name
National Institute of Advanced Industrial Science & Technology Tsukuba Ibaraki
産業技術総合研究所
Author PID
K001817
Creator Name
Kawai, Yoshinobu
河合, 良信
カワイ, ヨシノブ
Affiliation
Affiliation Name
Department of Advanced Energy Engineering Science, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
九州大学大学院総合理工学研究科先端エネルギー理工学専攻
Language
English
Publisher
九州大学大学院総合理工学府
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
Date
2004-12
Source Title
Engineering sciences reports, Kyushu University
Vol
26
Issue
3
First Page
337
Last Page
340
Publication Type
Version of Record
Access Rights
open access
JaLC DOI
https://doi.org/10.15017/16738
Related DOI
九州大学大学院総合理工学報告 || 26(3) || p337-340
Engineering sciences reports, Kyushu University || 26(3) || p337-340
http://www.tj.kyushu-u.ac.jp/
http://www.tj.kyushu-u.ac.jp/info/online/
Related URI
九州大学大学院総合理工学報告 || 26(3) || p337-340
Engineering sciences reports, Kyushu University || 26(3) || p337-340
http://www.tj.kyushu-u.ac.jp/
http://www.tj.kyushu-u.ac.jp/info/online/
Relation
九州大学大学院総合理工学報告 || 26(3) || p337-340
Engineering sciences reports, Kyushu University || 26(3) || p337-340
http://www.tj.kyushu-u.ac.jp/
http://www.tj.kyushu-u.ac.jp/info/online/
Abstract Plasma parameters were measured successfully in a 915 MHz ECR plasma with H2 and SiH4/H2 mixtures using a heated Langmuir probe. The experimental results show that there is a correlation between elect...ron temperature and crystallinity of microcrystalline silicon. From the data analysis, it was found that there is a possibility that the electron temperature increased by production of negative ions promotes the crystallinity via some chemical reactions.show more

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Details

Record ID
16738
Peer-Reviewed
Refereed
Subject Terms
Microcrystalline silicon
ECR plasma
Electron temperature
Heated Langmuir probe
ISSN
1346-7883
NCID
AA1147319X
Created Date 2010.03.09
Modified Date 2020.12.08

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