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Plasma parameters were measured successfully in a 915 MHz ECR plasma with H2 and SiH4/H2 mixtures using a heated Langmuir probe. The experimental results show that there is a correlation between elect...ron temperature and crystallinity of microcrystalline silicon. From the data analysis, it was found that there is a possibility that the electron temperature increased by production of negative ions promotes the crystallinity via some chemical reactions.続きを見る
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