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New types of oxygen sensor that can operate at room temperature using the intercalation of oxygen molecules for the layered compounds CuFeTe_2 have been developed. In our previous experiment, response... time for oxygen partial pressure was improved by using wet etching and photolithography for forming many fine holes on the surface of single-crystal CuFeTe_2 thin films. However, the resistance change was small in an oxygen gas response because sufficient etching depth was not obtained. In this study, we report application of deep etching onto CuFeTe_2 single crystal using of centrifugal etching in order to improve the aspect ratio and the etching depth.続きを見る
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