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Surface corona discharge preionization scheme was developed in order to realize a homogeneous main discharge over a large volume. The effect of the configuration of the perforated electrode on the dis...charge characteristics and laser output energy were investigated. The emission spectra from surface corona discharge are almost same as those from ark discharge by pin electrode, though the emission intensity are an order lower. The preionized electron density by surface corona discharge was measured to be 9 x 10^6cm^<-3> in He buffer gas and 4 x 10^7cm^<-3> in Ne buffer gas. The optimum diameter of perforated hole and the optimum percentage of openings were determined to be less than 3mm and 40-50%, respectively, from a point of view of laser beam quality and laser power dependency. The large aperture discharge, 20mm(gap) x 42mm(width), was demonstrated and the maximum average power of 110W was obtained by XeC1 laser with surface corona discharge preionization scheme.show more
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