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＜departmental bulletin paper＞
Investigation of VHF Argon Plasma at High Pressure by Balanced Power Feeding Using Laser Thomson Scattering

Creator
Author PID
K005236
Creator Name
Chen, Weiting
Affiliation
Affiliation Name
Department of Applied Science for Electronics and Materials,Kyushu University : Graduate Student
Author PID
K004242
Creator Name
Ogiwara, Kohei
荻原, 公平
オギワラ, コウヘイ
Affiliation
Affiliation Name
Graduate School of Information Science and Electrical Engineering, Kyushu university
九州大学大学院システム情報科学府
Author PID
L004896
Creator Name
Koge, Koichiro
神家, 幸一郎
コウゲ, コウイチロウ
Affiliation
Affiliation Name
Department of Applied Science for Electronics and Materials, Kyushu University : Graduate Student
九州大学大学院総合理工学府
Author PID
K003079
Creator Name
Tomita, Kentaro
冨田, 健太郎
トミタ, ケンタロウ
Affiliation
Affiliation Name
Department of Electrical and Material Science, Kyushu University
九州大学大学院総合理工学研究院
Author PID
K001477
Creator Name
Uchino, Kiichiro
内野, 喜一郎
ウチノ, キイチロウ
Affiliation
Affiliation Name
Department of Electrical and Material Science, Kyushu University
九州大学大学院総合理工学研究院
Author PID
K001817
Creator Name
Kawai, Yoshinobu
河合, 良信
カワイ, ヨシノブ
Affiliation
Affiliation Name
Department of Electrical and Material Science, Kyushu University
九州大学大学院総合理工学研究院
Language
English
Publisher
九州大学大学院総合理工学府
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
Date
2013-09
Source Title
Engineering sciences reports, Kyushu University
Vol
35
Issue
1
First Page
6
Last Page
11
Publication Type
Version of Record
Access Rights
open access
JaLC DOI
https://doi.org/10.15017/1397755
Related DOI
九州大学大学院総合理工学報告 || 35(1) || p6-11
Engineering Sciences Reports, Kyushu University || 35(1) || p6-11
http://www.tj.kyushu-u.ac.jp/
http://www.tj.kyushu-u.ac.jp/info/online/
Related URI
九州大学大学院総合理工学報告 || 35(1) || p6-11
Engineering Sciences Reports, Kyushu University || 35(1) || p6-11
http://www.tj.kyushu-u.ac.jp/
http://www.tj.kyushu-u.ac.jp/info/online/
Relation
九州大学大学院総合理工学報告 || 35(1) || p6-11
Engineering Sciences Reports, Kyushu University || 35(1) || p6-11
http://www.tj.kyushu-u.ac.jp/
http://www.tj.kyushu-u.ac.jp/info/online/
Abstract The dependences of the VHF plasma parameters on the gas pressure and power were examined by using the Laser Thomson scattering method, where the VHF plasma was produced in the high pressure region by ...the balanced power feeding method. It was found that the balanced power feeding method provides a high electron density plasma with low electron temperature at high pressures. This characteristics were confirmed by calculations using a 2-dimensional simulation code.show more

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Details

Record ID
1397755
Peer-Reviewed
Refereed
Subject Terms
VHF plasma
laser Thomson scattering
balanced power feeding
2-dimensional simulation
ISSN
1346-7883
NCID
AA1147319X
Created Date 2014.01.09
Modified Date 2020.12.02

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