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Applying MHz-frequency inverters to radio frequency (RF) power sources for plasma applications has been challenging because capacitive loads caused by load fluctuations cause destructive hard-switchin...g. This paper proposes a MHz-frequency load impedance estimation method for soft-switching control. The proposed system estimates the load impedance by utilizing a directional coupler that is typically built into an RF power source to observe traveling and reflected waves. Therefore, unlike typical low-frequency power electronics systems, the proposed system does not require output current sensors which are not suitable for MHz-frequencies. In the experiment, the proposed method was tested using the auxiliary switch-inductor circuit of a 3.75MHz gallium nitride (GaN) full-bridge inverter as the control target. Capacitive load detection by the proposed method was experimentally verified, and soft-switching control was realized under capacitive load. The transient response of the control under a fluctuating load that changes from inductive to capacitive was also measured. The inverter transitioned to soft-switching within 2.31 μ s after a load change, and hard-switching took only 8 cycles.続きを見る
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Mendeley出力
