<会議発表論文>
MEMS-type gas sensor toward ppt detection with super selectivity
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概要 | We have reported numerous significant material designs and demonstrated their efficacy when integrated to attain high performance of gas sensors. In pursuit of further enhancement, we have introduced ...and validated gas sensors that amalgamate the benefits of these material designs with MEMS-type metal oxide semiconductor gas sensors, achieving unparalleled levels of sensitivity and selectivity.続きを見る |
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登録日 | 2025.08.18 |
更新日 | 2025.08.20 |