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We perform an improved thermodynamic analysis of nonpolar (11＾＾－00) and (112＾＾－0) surfaces for AlN and GaN to elucidate the difference in growth condition among various types of nonpolar and polar sur...faces during metalorganic vapor-phase epitaxy (MOVPE). It is found that the maximum growth temperature of (11＾＾－00) surface is lower than those of (0001) and (0001＾＾－) surfaces. In contrast, the maximum growth temperature of (112＾＾－0) surface is high compared to that of (0001) surface. This orientation dependence corresponds to the relative stability between polar and nonpolar reconstructed surfaces. These results offer a way to provide the optimum growth conditions of AlN and GaN for the MOVPE.続きを見る
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Mendeley出力
