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Breath sensing system based on cavity ring-down spectroscopy (CRDS) technique is attractive due to its real time sensing in addition to the capability of high sensitivity. Utilizing waveguide for CRDS... may realize ppm-order components into a compact area. This work have exploited thermal oxidation technique to silicon high-mesa waveguides for sensing-application. Significant propagation loss reduction from 1.45 to 0.84 dB/cm at a waveguide width of 500 nm has been achieved by the technique successfully.続きを見る
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