Mendeley出力
＜図書＞
Plasma electronics : applications in microelectronic device fabrication
| 責任表示 | Toshiaki Makabe and Zoran Lj. Petrović |
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| データ種別 | 図書 |
| 版 | Third edition |
| 出版情報 | Boca Raton, Fla. : CRC Press , 2026 |
| 本文言語 | 英語 |
| 大きさ | xxxvii, 387 pages ; 24 cm |
所蔵情報
| 状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
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: hardback | 筑紫図 新着図書コーナー | 427.6/Ma 33 | 2026 |
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160012026001892 |
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書誌詳細
| 一般注記 | Content Type: text (ncrcontent), Media Type: unmediated (ncrmedia), Carrier Type: volume (ncrcarrier) First edition published by CRC Press 2006. Second edition published by CRC Press 2015 Includes bibliographical references and index Summary:"More than two decades have passed since the first edition of Plasma Electronics was published. Today, we are entering an era that demands increasingly sophisticated control and design of plasma sources and related surface technologies for micro- and nano-electronic device fabrication. Plasma technology, based on surface interactions, continues to expand into emerging fields including biotechnology, medical science, and environmental applications. Plasma Electronics: Applications in Microelectronic Device Fabrication, Third Edition, explains the fundamental physics and numerical methods essential for advancing these technologies from laboratory research to manufacturing-scale modeling and design of plasma sources and processes. This comprehensive resource has established itself as the standard reference for scientists, engineers, and graduate students working with weakly ionized, non-equilibrium plasmas. The book begins with a brief history of elementary processes and collective properties in low-temp |
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| 著者標目 | *Makabe, T. (Toshiaki) author Petrović, Z. author |
| 件 名 | LCSH:Plasma engineering FREE:Plasma engineering fast |
| 分 類 | LCC:TA2020 DC23:621.044 |
| 書誌ID | 1001849783 |
| ISBN | 9781041192237 |
| NCID | BD14316631 |
| 巻冊次 | : hardback ; ISBN:9781041192237 |
| NBN | GBC6041564 |
| 登録日 | 2026.10.02 |
| 更新日 | 2026.10.02 |