Mendeley出力
＜図書＞
Introduction to microsystem technology : a guide for students
| 責任表示 | Gerald Gerlach, Wolfram Dötzel, Dörte Müller |
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| シリーズ | The wiley microsystem and nanotechnology series |
| データ種別 | 図書 |
| 出版情報 | Chichester : John Wiley & Sons , c2008 |
| 本文言語 | 英語 |
| 大きさ | xxiii, 351 p. : ill. ; 25 cm |
| 概要 | This text covers essentials of microsystem technology, also known in the US as micro-electro-mechanical systems (MEMS). Coverage encompasses materials, fabrication techniques, sensors and actuators, t...e design of components and complete systems, and the future of Microsystems. Chapter topics include scaling and similarity, microfabrication, packaging, and the influence of technology parameters on microsystem properties. Examples, case studies, and chapter problems are included, with full solutions given on a web site. The book was first published in German by Carl Hanser Verlag, Munich, in 2006. Gerlach is affiliated with Dresden University of Technology, Germany. Dotzel is affiliated with Chemnitz University of Technology, Germany. Annotation ©2008 Book News, Inc., Portland, OR (booknews.com) 続きを見る |
所蔵情報
| 状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
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理系図2F 開架 | 549/G 36 | 2008 |
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031212009002002 |
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書誌詳細
| 一般注記 | Includes bibliographical reference and index |
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| 著者標目 | Gerlach, Gerald Dötzel, Wolfram Müller, Dörte |
| 書誌ID | 1001411887 |
| ISBN | 9780470058619 |
| NCID | BB00782449 |
| 巻冊次 | ISBN:9780470058619 |
| 登録日 | 2010.01.27 |
| 更新日 | 2010.01.27 |