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<図書>
Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range

責任表示 edited by Günter Wilkening, Ludger Koenders
データ種別 図書
出版情報 Weinheim : Wiley-VCH , c2005
本文言語 英語
大きさ xxii, 519 p. : ill. ; 25 cm
概要 In these papers taken from the Nanoscale 2004 seminar in March 2004, participants describe their work in qualitative measurement, instrumentation, calibration and applications. The 38 individual topic... include metrology of scanning probe microscopes, DSP-based scanning probe microscopes, sheer-force tunneling microscopes, SPM calibration, traceability, 3D calibration, tolerance systems, calibration standards, lateral resolution, tip shape and calibration, optical methods of calibration, lateral structures, surface applications, and material properties. Annotation ©2005 Book News, Inc., Portland, OR (booknews.com) 続きを見る

所蔵情報



筑紫図 1D 450-599 532.8/W 73 2005
067212006001036

書誌詳細

一般注記 Conference proceedings
Includes bibliographical references and index
著者標目 Wilkening, Günter
Koenders, Ludger
件 名 LCSH:Nanostructured materials -- Measurement -- Congresses  全ての件名で検索
LCSH:Microstructure -- Measurement -- Congresses  全ての件名で検索
LCSH:Scientific apparatus and instruments -- Calibration -- Congresses  全ての件名で検索
LCSH:Stereology -- Congresses  全ての件名で検索
分 類 LCC:QC176.8.N35
DC22:620.50287
DC22:681.20287
書誌ID 1001326703
ISBN 9783527405022
NCID BA79994126
巻冊次 ISBN:9783527405022 ; XISBN:352740502X
登録日 2009.09.18
更新日 2017.10.03