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<図書>
Electron-beam interactions with solids : application of the Monte Carlo method to electron scattering problems

責任表示 Maurizio Dapor
シリーズ Springer tracts in modern physics : Ergebnisse der exakten Naturwissenschaften / editor, G. Höhler ; v. 186
Physics and astronomy online library
データ種別 図書
出版情報 Berlin : Springer , c2003
本文言語 英語
大きさ x, 103 p ; 25 cm
概要 The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid inte...action in -- among other areas -- scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data. Book jacket.続きを見る
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所蔵情報



理系図 自動書庫 549/Dap/STMP186 2003
031112006609386

書誌詳細

著者標目 *Dapor, Maurizio
件 名 LCSH:Electrons -- Scattering  全ての件名で検索
LCSH:Monte Carlo method
LCSH:Electron beams
LCSH:Solids -- Effect of radiation on  全ての件名で検索
分 類 DC21:539.758
書誌ID 1001221765
ISBN 3540006524
NCID BA61918401
巻冊次 ISBN:3540006524
登録日 2009.09.18
更新日 2017.02.18

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