<図書>
The MEMS handbook
責任表示 | edited by Mohamed Gad-el-Hak |
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シリーズ | The mechanical engineering handbook series |
データ種別 | 図書 |
出版情報 | Boca Raton : CRC Press , c2002 |
本文言語 | 英語 |
大きさ | 1 v.(various pagings) ; 26 cm |
概要 | Microelectromechanical systems (MEMS)-tiny machines between one millimeter and one micron long-are finding increasing application in a variety of industrial and medical fields and have a potential wor...dwide market in the billions of dollars. This handbook explores various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. It will be indispensible as a reference for both experienced and graduate student scientists and engineers.続きを見る |
所蔵情報
状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
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理系図 自動書庫 | 530//GAD | 2002 |
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027212002001960 |
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書誌詳細
一般注記 | Includes bibliographical references and index |
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著者標目 | Gad-El-Hak, M. |
書誌ID | 1001196754 |
ISBN | 0849300770 |
NCID | BA54546125 |
巻冊次 | ISBN:0849300770 |
登録日 | 2009.09.18 |
更新日 | 2009.09.18 |