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<図書>
Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.

責任表示 editors, Paul H. Townsend ... [et al.]
シリーズ Materials Research Society symposium proceedings ; v. 308
データ種別 図書
出版情報 Pittsburgh, Pa. : Materials Research Society , c1993
本文言語 英語
大きさ xvii, 778 p. : ill. ; 24 cm
概要 Proceedings of the title symposium, held at the 1993 Spring Meeting of the MRS in San Francisco. The papers are arranged in nine sections following the topical outline upon which the symposium was org...nized: stresses in thin films; measuring stresses and mechanical properties--new techniques and developments; stress, electromigration, and voiding in fine line structures; stress relaxation mechanisms and thin film morphology; mechanics and microstructure in epitaxial layers; mechanical behavior of polymer coatings; mechanical deformation of thin films--the effects of microstructure and processing; fracture, adhesion, and wear of thin films--the effects of microstructure and processing; and the mechanical deformation of multilayer thin films. Annotation copyright by Book News, Inc., Portland, OR続きを見る

所蔵情報



理系図2F 開架 501.32/N 89/(4) 1993
068252194001970

書誌詳細

一般注記 Papers presented at the symposium entitled "Thin Films: Stresses and Mechanical Properties IV," held at the 1993 Spring Meeting of the Materials Research Society -- Preface.
Includes bibliographical references and indexes
著者標目 Townsend, Paul H.
Materials Research Society. Meeting
件 名 LCSH:Thin films -- Mechanical properties -- Congresses  全ての件名で検索
分 類 LCC:TA418.9.T45
DC20:621.381/52
書誌ID 1001143905
ISBN 1558992049
NCID BA21386894
巻冊次 ISBN:1558992049
登録日 2009.09.17
更新日 2009.09.17