Mendeley出力
＜図書＞
Cold plasma in materials fabrication : from fundamentals to applications
| 責任表示 | Alfred Grill |
|---|---|
| データ種別 | 図書 |
| 出版情報 | Piscataway, NJ : IEEE Press New York : Institute of Electrical and Electronics Engineers , c1994 |
| 本文言語 | 英語 |
| 大きさ | xiii, 257 p. : ill. ; 24 cm |
| 概要 | Processing by plasma-assisted techniques is growing in the production and manufacturing processes of a wide range of industries including automotive, aerospace, biomedicine, and microelectronics. Gril..., a researcher at IBM, explains the main parameters and types of plasma, internal reactions and reactions with solid surfaces, generating and diagnosing cold plasmas, and their application in the processing of materials. Annotation copyright by Book News, Inc., Portland, OR続きを見る |
所蔵情報
| 状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
|---|---|---|---|---|---|---|---|---|---|---|
|
|
|
シ情 情報エレク[AD11] | 427.6/Gri | 1994 |
|
068252194006692 |
|
書誌詳細
| 一般注記 | Includes bibliographical references and index |
|---|---|
| 著者標目 | *Grill, Alfred |
| 件 名 | LCSH:Plasma engineering LCSH:Low temperature plasmas LCSH:Manufacturing processes |
| 分 類 | LCC:TA2020 DC20:621.044 |
| 書誌ID | 1001137841 |
| ISBN | 0780310551 |
| NCID | BA22840916 |
| 巻冊次 | ISBN:0780310551 |
| 登録日 | 2009.09.17 |
| 更新日 | 2009.09.17 |