Ion implantation and ion beam equipment : proceedings of the international conference, Elenite, Bulgaria, September 24-30, 1990

＜図書＞
Ion implantation and ion beam equipment : proceedings of the international conference, Elenite, Bulgaria, September 24-30, 1990

責任表示	editors, D. S. Karpuzov, I. V. Katardjiev & S. S. Todorov
データ種別	図書
出版情報	Singapore : World Scientific , c1991
本文言語	英語
大きさ	xiv, 588 p. ; 23 cm.
概要	The proceedings of the International Conference on [title] held in Elenite, Bulgaria, September 1990, cover ion implantation in semiconductors--device applications; ion implantation in compound semico...ductors; implantation-induced damage; annealing of defects in semiconductors; ion source technology and beam transport; ion implantation in metals, ceramics, and insulators; ion beam assisted deposition, ion beam mixing, sputtering; and materials analysis using ion beams. No index. Acidic paper. Annotation copyrighted by Book News, Inc., Portland, OR続きを見る

状態	巻次	所蔵場所	請求記号	刷年	文庫名称	資料番号	コメント	予約・取寄	複写申込	自動書庫
		理系図1F 開架	427.5/Ka 68	1991		068252192002132		予約・取寄			予約・取寄

著者標目	International Conference on Ion Implantation and Ion Beam Equipment (1990 : Elenite, Bulgaria) Karpuzov, D. S. Katardjiev, I. V. Todorov, S. S.
書誌ID	1001095862
ISBN	9810205589
NCID	BA13515175
巻冊次	ISBN:9810205589
登録日	2009.09.17
更新日	2009.09.17