<図書>
Radio-frequency capacitive discharges
| 責任表示 | Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko |
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| データ種別 | 図書 |
| 出版情報 | Boca Raton ; Tokyo : CRC Press , c1995 |
| 本文言語 | 英語 |
| 大きさ | xii, 292 p. : ill. ; 24 cm |
| 概要 | The first publication of its kind in the field, this book describes comprehensively & systematically radio-frequency (rf) capacitive gas discharges of intermediate & low pressure & their application t... gas laser excitation & to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods & results, & theoretical & numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical & experimental works. They provide simple & clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students & postgraduates & as a comprehensive guidebook by specialists. 続きを見る |
所蔵情報
| 状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
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筑紫図 1C 400-449 | 427.5/R 12 | 1995 |
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062212000000412 |
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応研 研究室 | 549/R 11 | 1995 |
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071232000094200 |
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書誌詳細
| 一般注記 | Translation from Russian Includes bibliographical references (p. 271-289) and index |
|---|---|
| 著者標目 | *Raĭzer, I︠U︡. P. (I︠U︡riĭ Petrovich) Shneider, Mikhail N. Yatsenko, Nikolai A. |
| 件 名 | LCSH:Radio frequency discharges LCSH:Electric discharges through gases LCSH:Carbon dioxide lasers LCSH:Plasma diagnostics |
| 分 類 | LCC:QC711.8.R35 DC20:537.5/34 |
| 書誌ID | 1000977775 |
| ISBN | 0849386446 |
| NCID | BA26633662 |
| 巻冊次 | ISBN:0849386446 |
| 登録日 | 2009.09.16 |
| 更新日 | 2009.09.16 |
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