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<図書>
Radio-frequency capacitive discharges

責任表示 Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko
データ種別 図書
出版情報 Boca Raton ; Tokyo : CRC Press , c1995
本文言語 英語
大きさ xii, 292 p. : ill. ; 24 cm
概要 The first publication of its kind in the field, this book describes comprehensively & systematically radio-frequency (rf) capacitive gas discharges of intermediate & low pressure & their application t... gas laser excitation & to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods & results, & theoretical & numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical & experimental works. They provide simple & clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students & postgraduates & as a comprehensive guidebook by specialists. 続きを見る

所蔵情報



筑紫図 1C 400-449 427.5/R 12 1995
062212000000412


応研 研究室 549/R 11 1995
071232000094200

書誌詳細

一般注記 Translation from Russian
Includes bibliographical references (p. 271-289) and index
著者標目 *Raĭzer, I︠U︡. P. (I︠U︡riĭ Petrovich)
Shneider, Mikhail N.
Yatsenko, Nikolai A.
件 名 LCSH:Radio frequency discharges
LCSH:Electric discharges through gases
LCSH:Carbon dioxide lasers
LCSH:Plasma diagnostics
分 類 LCC:QC711.8.R35
DC20:537.5/34
書誌ID 1000977775
ISBN 0849386446
NCID BA26633662
巻冊次 ISBN:0849386446
登録日 2009.09.16
更新日 2009.09.16