<図書>
Microelectronic materials
| 責任表示 | C.R.M. Grovenor |
|---|---|
| シリーズ | Graduate student series in materials science and engineering |
| データ種別 | 図書 |
| 出版情報 | Bristol ; Philadelphia : A. Hilger , c1989 |
| 本文言語 | 英語 |
| 大きさ | x, 544 p. : ill. ; 24 cm |
| 概要 | This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the des...gn of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. It has been designed for senior undergraduates, graduates, and researchers in physics, electronic engineering, and materials science. This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. It has been designed for senior undergraduates, graduates, and researchers in physics, electronic engineering, and materials science. 続きを見る |
所蔵情報
| 状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
|---|---|---|---|---|---|---|---|---|---|---|
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hbk. | 総理工 研究室 | 541.6/C 15 | 1989 |
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062231998004081 |
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書誌詳細
| 一般注記 | Includes bibliographies and index |
|---|---|
| 著者標目 | *Grovenor, C. R. M., 1955- |
| 件 名 | LCSH:Microelectronics -- Materials 全ての件名で検索 |
| 分 類 | LCC:TK7874 DC19:621.381/7 |
| 書誌ID | 1000976425 |
| ISBN | 085274269X |
| NCID | BA07037705 |
| 巻冊次 | hbk. ; ISBN:085274269X ; PRICE:£60.00 ($162.00 U.S.) pbk. ; ISBN:0852742703 ; PRICE:£20.00 ($54.00) |
| 登録日 | 2009.09.16 |
| 更新日 | 2009.09.16 |
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