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<図書>
Microelectronic materials

責任表示 C.R.M. Grovenor
シリーズ Graduate student series in materials science and engineering
データ種別 図書
出版情報 Bristol ; Philadelphia : A. Hilger , c1989
本文言語 英語
大きさ x, 544 p. : ill. ; 24 cm
概要 This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the des...gn of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. It has been designed for senior undergraduates, graduates, and researchers in physics, electronic engineering, and materials science.
This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. It has been designed for senior undergraduates, graduates, and researchers in physics, electronic engineering, and materials science.
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所蔵情報


hbk. 総理工 研究室 541.6/C 15 1989
062231998004081

書誌詳細

一般注記 Includes bibliographies and index
著者標目 *Grovenor, C. R. M., 1955-
件 名 LCSH:Microelectronics -- Materials  全ての件名で検索
分 類 LCC:TK7874
DC19:621.381/7
書誌ID 1000976425
ISBN 085274269X
NCID BA07037705
巻冊次 hbk. ; ISBN:085274269X ; PRICE:£60.00 ($162.00 U.S.)
pbk. ; ISBN:0852742703 ; PRICE:£20.00 ($54.00)
登録日 2009.09.16
更新日 2009.09.16