Mendeley出力
＜図書＞
Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
| 責任表示 | editors, David J. Srolovitz ... [et al.] |
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| シリーズ | Materials Research Society symposium proceedings ; v. 389 |
| データ種別 | 図書 |
| 出版情報 | Pittsburgh : Materials Research Society , c1995 |
| 本文言語 | 英語 |
| 大きさ | xi, 382 p. ; 24 cm |
| 概要 | The April 1995 symposium brought together the materials science community interested in modeling thin-film growth and processing. It included researchers performing computer simulations on length scal...s ranging from the atomic all the way up to the entire deposition reactor. This volume is loosely organized in ascending order of modeling length scales. The topics include deposition and growth modeling, film morphology and topology, film microstructure, failure mechanisms, etching, process modeling and control, and reactor scale modeling. Annotation copyright by Book News, Inc., Portland, OR続きを見る |
所蔵情報
| 状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
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筑紫図 Biblio Cookies 2階_会議録 | 501.408/Ma 71/389 | 1995 |
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068622195001242 |
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書誌詳細
| 一般注記 | Includes bibliographical references and index |
|---|---|
| 著者標目 | Srolovitz, David J. Materials Research Society Symposium on the "Modeling and Simulation of Thin-Film Processing" (1995 : San Francisco, Calif.) |
| 件 名 | LCSH:Thin films -- Mathematical models -- Congresses
全ての件名で検索
LCSH:Thin films -- Computer simulation -- Congresses 全ての件名で検索 LCSH:Crystal growth -- Mathematical models -- Congresses 全ての件名で検索 |
| 分 類 | LCC:QC176.82 DC20:621.3815/2 |
| 書誌ID | 1000956725 |
| ISBN | 1558992928 |
| NCID | BA26264056 |
| 巻冊次 | ISBN:1558992928 |
| 登録日 | 2009.09.16 |
| 更新日 | 2009.09.16 |