Introduction to microlithography : theory, materials, and processing

＜図書＞
Introduction to microlithography : theory, materials, and processing

責任表示	L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
シリーズ	ACS symposium series ; 219
データ種別	図書
出版情報	Washington, D.C. : The American Chemical Society , 1983
本文言語	英語
大きさ	ix, 363 p. : ill. ; 24 cm
目次	An introduction to lithography / L.F. Thompson The lithographic process The physics / L.F. Thompson and M.J. Bowden Organic resist materials Theory and chemistry / C. Grant Willson Resist processing / L.F. Thompson and M.J. Bowden Plasma etching / J.A. Mucha and D.W. Hess Multi-layer resist systems / B.J. Lin

状態	巻次	所蔵場所	請求記号	刷年	文庫名称	資料番号	コメント	予約・取寄	複写申込	自動書庫
		筑紫図 1A 600-999	749.1/I 57	1983		072232000009342		予約・取寄			予約・取寄

内容注記	An introduction to lithography / L.F. Thompson The lithographic process The physics / L.F. Thompson and M.J. Bowden Organic resist materials Theory and chemistry / C. Grant Willson Resist processing / L.F. Thompson and M.J. Bowden Plasma etching / J.A. Mucha and D.W. Hess Multi-layer resist systems / B.J. Lin
一般注記	Includes bibliographical references and index
著者標目	Thompson, L. F., 1944- Willson, C. G. (C. Grant), 1939- Bowden, M. J., 1943- American Chemical Society. Division of Polymeric Materials : Science and Engineering American Chemical Society. Meeting (185th : 1983 : Seattle, Wash.)
件　名	LCSH:Microlithography -- Congresses 全ての件名で検索 LCSH:Photoresists -- Congresses 全ての件名で検索 LCSH:Plasma etching -- Congresses 全ての件名で検索
分　類	LCC:TR940 DC19:686.2/315 NDLC:PE31
書誌ID	1000938743
ISBN	0841207755
NCID	BA04572087
巻冊次	ISBN:0841207755
登録日	2009.09.16
更新日	2009.09.16