Surface analysis and interactions

＜図書＞
Surface analysis and interactions

責任表示	edited by Orlando Auciello, Daniel L. Flamm
シリーズ	Plasma-materials interactions ; . Plasma diagnostics ; v. 2
データ種別	図書
出版情報	Boston ; Tokyo : Academic Press , c1989
本文言語	英語
大きさ	x, 337 p. : ill. ; 24 cm
概要	Plasmas and their interaction with materials have become subjects of major interest because of their importance in modern forefront technologies such as microelectronics, fusion energy, and space. Pla...mas are used in microelectronics to process semiconductors (etching of patterns for microcircuits, plasma-induced deposition of thin films, etc.); plasmas produce deleterious erosion effects on surfaces of materials used for fusion devices and spaceships exposed to the low earth environment. Diagnostics of plasmas and materials exposed to them are fundamental to the understanding of the physical and chemical phenomena involved. Plasma Diagnostics provides a comprehensive treatment of the subject. short version, TJE_ Plasmas and their interaction with materials have become subjects of major interest because of their importance in modern forefront technologies such as microelectronics, fusion energy, and space. Diagnostics of plasmas and materials exposed to them are fundamental to the understanding of the physical and chemical phenomena involved. Plasma Diagnostics provides a comprehensive treatment of the subject. 続きを見る
目次	v. 1. Discharge parameters and chemistry v. 2. Surface analysis and interactions.

状態	巻次	所蔵場所	請求記号	刷年	文庫名称	資料番号	コメント	予約・取寄	複写申込	自動書庫
		理系図1F 開架	427.6/A 96/(2)	1989		068252189005666		予約・取寄			予約・取寄
		筑紫図 1C 400-449	428.41/A 96	1989		067212000004948		予約・取寄			予約・取寄

一般注記	Includes bibliographies and index
著者標目	Auciello, Orlando, 1945- Flamm, Daniel L.
件　名	LCSH:Plasma diagnostics
分　類	DC19:530.4/1 LCC:QC718.5.D5P54 NDC7:428.41 NDC7:428.7
書誌ID	1000929820
ISBN	0120676362
NCID	BA0693230X
巻冊次	ISBN:0120676362
登録日	2009.09.16
更新日	2011.11.17