Mendeley出力
＜図書＞
Thin film processes
| 責任表示 | edited by John L. Vossen, Werner Kern |
|---|---|
| データ種別 | 図書 |
| 出版情報 | New York : Academic Press , c1978-c1991 |
| 本文言語 | 英語 |
| 大きさ | 2 v. ; 24 cm |
| 概要 | This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discuss...s selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Key Features * Provides an all-new sequel to the 1978 classic, Thin Film Processes * Introduces new topics, and several key topics presented in the original volume are updated * Emphasizes practical applications of major thin film deposition and etching processes * Helps readers find the appropriate technology for a particular application This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Key Features * Provides an all-new sequel to the 1978 classic, Thin Film Processes * Introduces new topics, and several key topics presented in the original volume are updated * Emphasizes practical applications of major thin film deposition and etching processes * Helps readers find the appropriate technology for a particular application 続きを見る |
| 電子版へのリンク | https://hdl.handle.net/2324/6877805 |
所蔵情報
| 状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
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[v. 1] | 理系図 自動書庫 | B/Vos | 1978 |
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026232003062061 |
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[v. 1] | 筑紫図 1C 450-599 | 549.8/V 93/ [1] | 1978 |
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072232000015305 |
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v. 2 | 筑紫図 1C 450-599 | 549.8/V 93 | c1991 |
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072232000006042 |
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書誌詳細
| 一般注記 | Includes bibliographical references and index |
|---|---|
| 著者標目 | *Vossen, John L. Kern, Werner, 1925- |
| 件 名 | LCSH:Thin films |
| 分 類 | NDC8:549.8 LCC:TK7871.15.F5 DC:621.381/73 |
| 書誌ID | 1000906216 |
| ISBN | 0127282505 |
| NCID | BA07244197 |
| 巻冊次 | [v. 1] ; ISBN:0127282505 v. 2 ; ISBN:0127282513 |
| 登録日 | 2009.09.16 |
| 更新日 | 2009.09.17 |