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For the measurements of molecular and electron properties in a microwave discharge plasma produced in a gas mixture of H$_2$ and CH$_4$, laser Raman scattering and laser Thomson scattering have been a...pplied as diagnostic methods. Measured gas temperatures were more than 1500 K in the plasma center and about 300 K near the chamber wall. On the other hand, H$_2$ densities were at 20 % of the initially filled H$_2$ density in the plasma center and almost 100 % at the chamber wall. It was shown that the decrease in the density of H$_2$ in the plasma was caused by the increase in temperature. The larger decrease of the measured density of CH$_4$ molecules compared with that of H$_2$ density, was largely affected by dissociation. Also, electron density and electron temperature of the H$_2$/CH$_4$ plasma were successfully measured for the first time. Based on the results of these measurements, discharge and molecular-reaction processes were analyzed quantitatively.続きを見る
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