<図書>
Surfaces, interfaces, and thin films for microelectronics
責任表示 | Eugene A. Irene |
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データ種別 | 図書 |
出版者 | Hoboken, N.J. : Wiley-Interscience |
出版年 | c2008 |
本文言語 | 英語 |
大きさ | xiii, 515 p. : ill. ; 25 cm |
概要 | Detailing fundamentals and important analytical techniques, Irene (chemistry, University of North Carolina-Chapel Hill) helps scientists and engineers understand existing microelectronic applications ...nd design new ones. Chapters in Part I of the book explain surface science fundamentals, covering both geometric and electronic structure, surface thermodynamics, morphology, and a sample of surface science techniques. Part II covers microelectronics applications such as films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the silicon-silicon dioxide interface, and other MOSFET interfaces. The book can be used as a self-study guide for professionals in the electronics industry, and as a text for upper-level undergraduate and graduate students taking courses in materials science, chemistry, physics, and electrical engineering. Annotation ©2008 Book News, Inc., Portland, OR (booknews.com) 続きを見る |
所蔵情報
状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
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: hard | 理系図1F 開架 | 431.8/I 63 | 2008 |
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031212009002041 |
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書誌詳細
一般注記 | Includes bibliographical references and index |
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著者標目 | Irene, Eugene A. |
件 名 | LCSH:Surface chemistry LCSH:Interfaces (Physical sciences) LCSH:Thin films LCSH:Microelectronics -- Materials 全ての件名で検索 |
分 類 | LCC:QD506 DC22:621.381 |
書誌ID | 1001411889 |
ISBN | 9780470174470 |
NCID | BA86791865 |
巻冊次 | : hard ; ISBN:9780470174470 |
登録日 | 2010.01.27 |
更新日 | 2010.01.27 |