Mendeley出力
＜図書＞
Surfaces, interfaces, and thin films for microelectronics
| 責任表示 | Eugene A. Irene |
|---|---|
| データ種別 | 図書 |
| 出版情報 | Hoboken, N.J. : Wiley-Interscience , c2008 |
| 本文言語 | 英語 |
| 大きさ | xiii, 515 p. : ill. ; 25 cm |
| 概要 | Detailing fundamentals and important analytical techniques, Irene (chemistry, University of North Carolina-Chapel Hill) helps scientists and engineers understand existing microelectronic applications ...nd design new ones. Chapters in Part I of the book explain surface science fundamentals, covering both geometric and electronic structure, surface thermodynamics, morphology, and a sample of surface science techniques. Part II covers microelectronics applications such as films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the silicon-silicon dioxide interface, and other MOSFET interfaces. The book can be used as a self-study guide for professionals in the electronics industry, and as a text for upper-level undergraduate and graduate students taking courses in materials science, chemistry, physics, and electrical engineering. Annotation ©2008 Book News, Inc., Portland, OR (booknews.com) 続きを見る |
所蔵情報
| 状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
|---|---|---|---|---|---|---|---|---|---|---|
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: hard | 理系図1F 開架 | 431.8/I 63 | 2008 |
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031212009002041 |
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書誌詳細
| 一般注記 | Includes bibliographical references and index |
|---|---|
| 著者標目 | Irene, Eugene A. |
| 件 名 | LCSH:Surface chemistry LCSH:Interfaces (Physical sciences) LCSH:Thin films LCSH:Microelectronics -- Materials 全ての件名で検索 |
| 分 類 | LCC:QD506 DC22:621.381 |
| 書誌ID | 1001411889 |
| ISBN | 9780470174470 |
| NCID | BA86791865 |
| 巻冊次 | : hard ; ISBN:9780470174470 |
| 登録日 | 2010.01.27 |
| 更新日 | 2010.01.27 |