Mendeley出力
＜図書＞
Instabilities in silicon devices : silicon passivation and related instabilities
| 責任表示 | edited by Gérard Barbottin and André Vapaille |
|---|---|
| データ種別 | 図書 |
| 出版者 | Amsterdam ; New York : North-Holland |
| 出版者 | New York, N.Y., U.S.A. : Sole distributors for the U.S.A. and Canada, Elsevier Science Pub. Co. |
| 出版年 | 1986-1989 |
| 本文言語 | 英語 |
| 大きさ | v. : ill. ; 27 cm |
| 概要 | An instructive and up-to-date manual for: bull; Engineers and technicians working in the semiconductor industry in such fields as: circuit design, manufacturing engineering, material and process char...cterization, quality and reliability assurance, failure analysis. bull; Graduate students and research scientists in material science and electrical engineering, interested in insulator physics, semiconductor physics, device physics and electronics. Today, silicon technology forms the basis of a worldwide, multi-million dollar component industry. The reasons for this expansioncan be found not only in the physical properties of silicon but also in the unique properties of the silicon-silicon dioxide interface. In spite of steady improvements in fabrication processes, silicon devices are still subject to undesired electrical phenomena referred to as 'instabilities'. These are due mostly to the imperfect nature either of the insulators used and/or of the semiconductor-insulator interface. The problem of instabilities is addressed in this volume which is the result of a fruitful cooperation between engineers working in the silicon industry, research scientists in the filed of micro-electronics, and university professors. The volume will aid circuit manufacturers and circuit users alike to relate unstable electrical parameters and characteristics to the physical defects and impurities which caused them. It may also be used as a textbook, provided the reader is familiar with the basics of materials physics and electronics. 続きを見る |
| 目次 | v. 1-2. Silicon passivation and related instabilities v. 3. New insulators, devices, and radiation effects. |
所蔵情報
| 状態 | 巻次 | 所蔵場所 | 請求記号 | 刷年 | 文庫名称 | 資料番号 | コメント | 予約・取寄 | 複写申込 | 自動書庫 |
|---|---|---|---|---|---|---|---|---|---|---|
| Vol. 1 | 【故障中】理系図 自動書庫 | M/Ba | 1986 |
|
068252186008568 |
|
書誌詳細
| 一般注記 | Includes bibliographies and indexes |
|---|---|
| 著者標目 | Barbottin, Gérard, 1946- Vapaille, André, 1933- |
| 件 名 | LCSH:Silicon -- Electric properties -- Congresses
全ての件名で検索
LCSH:Integrated circuits -- Passivation -- Congresses 全ての件名で検索 |
| 分 類 | LCC:TK7871.15.S55 DC19:621.3815/2 |
| 書誌ID | 1001048218 |
| ISBN | 0444879447 |
| NCID | BA01034486 |
| 巻冊次 | Vol. 1 ; ISBN:0444879447 v. 2 ; ISBN:0444700161 |
| 登録日 | 2009.09.17 |
| 更新日 | 2009.09.17 |